We have collaborated with Metaoptics Technologies Pte. Ltd. and developed the world’s first deep-ultraviolet (DUV) direct laser writer (DLW) empowered by 2D lens technology. This breakthrough allows the DLW to surpass traditional resolution limits, achieving a minimum feature size of sub-90 nm and a 125 nm line/space half-pitch resolution. This project’s success paves the way for a compact and cost-efficient DLW tool, ideal for emerging and high-demand opto-electronic applications such as metalens fabrication, previously reliant on expensive e-beam and immersion lithography tools.

For details: https://www.metaoptics.sg/product/direct-laser-writer